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Simon Josef Thür
Semiconductors_Summary
Commits
b57a5f52
Verified
Commit
b57a5f52
authored
1 year ago
by
Simon Josef Thür
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add sum cmos
parent
7f5003b4
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10_mos.tex
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-3
107 additions, 3 deletions
10_mos.tex
format.tex
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-61
63 additions, 61 deletions
format.tex
imgs/nmos_electrostaticpotential.png
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imgs/nmos_electrostaticpotential.png
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170 additions
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64 deletions
10_mos.tex
+
107
−
3
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b57a5f52
\section
{
MOS structure
}
\section
{
MOS structure
}
IDKF, lecture hasnt been given yet
\begin{figure}
[h]
\ No newline at end of file
\centering
\caption
{
Gate structure
}
\begin{tikzpicture}
\draw
(0,0) rectangle ++(1,2)
rectangle ++(2,-2)
rectangle ++(2,2)
rectangle ++(3,-2)
;
\node
at (0.5,1) ()
{$
M
$}
;
\node
at (2,1) ()
{$
SiO
_
2
$}
;
\node
at (4,1) ()
{$
SCR
$}
;
\node
at (6,1) ()
{$
p
-
Si
$}
;
\end{tikzpicture}
\end{figure}
Where
$
M
$
is the metal,
$
SiO
_
2
$
is the gate oxide,
$
SCR
$
is the space charge region and
$
p
-
Si
$
is the p doped substrate.
(note that in for the SCR, there is short between the metal and the bulk.)
\subsection
{
Electrostatic analysis
}
\begin{figure}
[h]
\centering
\caption
{
Charge distribution at thermal equilibrium
}
\begin{tikzpicture}
\draw
(0,0) rectangle ++(1,2)
rectangle ++(2,-2)
rectangle ++(2,2)
rectangle ++(3,-2)
;
\node
at (0.5,1) ()
{$
M
$}
;
\node
at (2,1) ()
{$
SiO
_
2
$}
;
\node
at (4,1) ()
{$
SCR
$}
;
\node
at (6,1) ()
{$
p
-
Si
$}
;
\draw
[red]
(0,0.2) node[left]()
{$
0
$}
-- ++(1,0)
-- ++(0,1.5)
-- ++(0,-1.5)
-- ++(2,0)
-- ++(0,-0.5)
-- ++(2,0)
-- ++(0,0.5)
-- ++(3,0)
;
\node
[red]
at (4,0.2) ()
{$
Q
_
M
$}
;
\end{tikzpicture}
\end{figure}
Where at the interface of the metal and the oxide, we have continuity of the electric displacement:
\begin{align}
\varepsilon
_{
ox
}
E
_{
ox
}
&
= Q
_
M
\\
\Rightarrow
E
_{
ox
}
&
=
\frac
{
Q
_
M
}{
\varepsilon
_{
ox
}}
\\
D
_{
ox
}
&
= D
_{
sc,int
}
\\
\Rightarrow
\varepsilon
{
ox
}
E
_{
ox
}
&
=
\varepsilon
{
sc
}
E
_{
sc,int
}
\\
\Rightarrow
\frac
{
E
_{
ox
}}{
E
_{
sc,int
}}
&
=
\frac
{
\varepsilon
_{
r,sc
}}{
\varepsilon
_{
r,ox
}}
\qquad\approx
3
\end{align}
And at the interface of the SCR and the substrate we have the following displacement continuity:
\begin{align}
\varepsilon
_{
sc
}
E
_{
sc
}
(x)
&
= -qN
_
A
\left
(x
_
D - x
\right
)
\\
\Rightarrow
E
_{
sc
}
(x)
&
= -
\frac
{
qN
_
A
}{
\varepsilon
_{
sc
}}
\left
(x-x
_
D
\right
)
\end{align}
\subsection
{
Electrostatic potential
}
Nothing new, just integrate over the electric field.
(see
\autoref
{
fig:mos
_
electrostaticpotential
}
)
\begin{figure}
[h]
\centering
\caption
{
Electrostatic potential of MOS
}
\label
{
fig:mos
_
electrostaticpotential
}
\includegraphics
[width=.95\textwidth]
{
imgs/nmos
_
electrostaticpotential.png
}
\end{figure}
\begin{equation}
\phi
(x) =
\begin{cases}
\phi
_
p
&
: x
_
D < x
\\
\phi
_
p +
\frac
{
q N
_
A
}{
2
\varepsilon
_{
sc
}}
\left
(x - x
_
D
\right
)
^
2
&
: 0 < x < x
_
D
\\
\phi
_
p +
\frac
{
q N
_
A
}{
2
\varepsilon
_{
sc
}}
x
_
D
^
2 -
\frac
{
q N
_
A x
_
D
}{
\varepsilon
_{
sc
}}
x
&
: -t
_{
ox
}
<x<0
\\
\phi
_{
n+
}
&
: x<t
_{
ox
}
\end{cases}
\end{equation}
and so finally
\begin{align}
\begin{split}
\phi
_
B
&
= V
_
B + V
_{
ox
}
\\
&
=
\frac
{
q N
_
A x
_
D
^
2
}{
2
\varepsilon
_{
sc
}}
+
\frac
{
1 N
_
A x
_
D t
_{
ox
}}{
\varepsilon
_{
ox
}}
\end{split}
\\
\begin{split}
x
_
D
&
=
\frac
{
\varepsilon
_{
sc
}}{
\varepsilon
_{
ox
}}
t
_{
ox
}
\left
(
\sqrt
{
1 +
\frac
{
2
\varepsilon
_{
ox
}^
2
\phi
_
B
}{
\varepsilon
_{
sc
}
q N
_
A t
_{
ox
}^
2
}}
- 1
\right
)
\\
&
=
\frac
{
\varepsilon
_{
sc
}}{
C
_{
ox
}}
\left
(
\sqrt
{
1+
\frac
{
4
\phi
_
B
}{
\gamma
^
2
}}
-1
\right
)
\end{split}
\\
C
_{
ox
}
&
=
\frac
{
\varepsilon
_{
ox
}}{
t
_{
ox
}}
\\
\gamma
&
=
\frac
{
1
}{
C
_{
ox
}}
\sqrt
{
2
\varepsilon
q N
_
A
}
\end{align}
\subsection
{
Contact potential
}
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format.tex
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−
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\documentclass
[11pt, a4paper]
{
article
}
\documentclass
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article
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[utf8]
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[utf8]
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inputenc
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[T1]
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\usepackage
[T1]
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fontenc
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\usepackage
{
lmodern
}
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{
lmodern
}
\usepackage
{
fourier
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\usepackage
{
fourier
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% even-odd
% even-odd
% \setlength{\textwidth}{146.8mm} % = 210mm - 37mm - 26.2mm
% \setlength{\textwidth}{146.8mm} % = 210mm - 37mm - 26.2mm
% \setlength{\oddsidemargin}{11.6mm} % 37mm - 1in (from offset)
% \setlength{\oddsidemargin}{11.6mm} % 37mm - 1in (from offset)
% \setlength{\evensidemargin}{0.8mm} % = 26.2mm - 1in (from offset)
% \setlength{\evensidemargin}{0.8mm} % = 26.2mm - 1in (from offset)
% \setlength{\topmargin}{-2.2mm} % = 0mm -1in + 23.2mm
% \setlength{\topmargin}{-2.2mm} % = 0mm -1in + 23.2mm
% \setlength{\textheight}{221.9mm} % = 297mm -29.5mm -31.6mm - 14mm (It works, trust me)
% \setlength{\textheight}{221.9mm} % = 297mm -29.5mm -31.6mm - 14mm (It works, trust me)
% all same: (for even odd, comment out geometry)
% all same: (for even odd, comment out geometry)
\usepackage
[a4paper,top=22mm,bottom=28mm,inner=30mm,outer=30mm]
{
geometry
}
\usepackage
[a4paper,top=22mm,bottom=28mm,inner=30mm,outer=30mm]
{
geometry
}
% \usepackage[french, nswissgerman, english]{babel}
% \usepackage[french, nswissgerman, english]{babel}
\usepackage
[english]
{
babel
}
\usepackage
[english]
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babel
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\usepackage
[parfill]
{
parskip
}
\usepackage
[parfill]
{
parskip
}
\usepackage
{
microtype
}
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{
microtype
}
\usepackage
{
amsmath
}
\usepackage
{
amsmath
}
\usepackage
{
amsfonts
}
\usepackage
{
amsfonts
}
\usepackage
{
amssymb
}
\usepackage
{
amssymb
}
\usepackage
{
mathtools
}
\usepackage
{
mathtools
}
\usepackage
{
subcaption
}
\usepackage
{
subcaption
}
\usepackage
{
graphicx, xcolor
}
\usepackage
{
graphicx, xcolor
}
\usepackage
[european,straightvoltages]
{
circuitikz
}
\usepackage
[european,straightvoltages]
{
circuitikz
}
\usepackage
{
tikz
}
\usepackage
{
tikz
}
\usepackage
{
url
}
\usepackage
{
url
}
\usepackage
[pdfusetitle]
{
hyperref
}
\usepackage
[pdfusetitle]
{
hyperref
}
\hypersetup
{
\hypersetup
{
pdfborder=
{
0 0 0
}
,
pdfborder=
{
0 0 0
}
,
colorlinks=true,
colorlinks=true,
linkcolor=black,
linkcolor=black,
citecolor=black,
citecolor=black,
urlcolor=black,
urlcolor=black,
bookmarksopen=false,
bookmarksopen=false,
}
}
\urlstyle
{
same
}
\urlstyle
{
same
}
% \usepackage{comment}
% \usepackage{comment}
\setlength
{
\headheight
}{
14pt
}
\setlength
{
\headheight
}{
14pt
}
%Fancy is fancy :)
%Fancy is fancy :)
\usepackage
{
fancyhdr
}
\usepackage
{
fancyhdr
}
\pagestyle
{
fancy
}
\pagestyle
{
fancy
}
\fancyhf
{}
\fancyhf
{}
\fancyfoot
{}
\fancyfoot
{}
\fancyhead
{}
\fancyhead
{}
\rhead
{
\today
}
\rhead
{
\today
}
\lhead
{}
\lhead
{}
\cfoot
{
\thepage
}
\cfoot
{
\thepage
}
\numberwithin
{
equation
}{
subsection
}
\numberwithin
{
equation
}{
subsection
}
\numberwithin
{
figure
}{
subsection
}
\numberwithin
{
table
}{
subsection
}
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